Characterization of Lattice Damage in Ion Implanted Silicon: Monte Carlo Simulation Combined with Double Crystal X-Ray Diffraction

✍ Scribed by Cembali, F. ;Mazzone, A. M. ;Servidori, M.

• Publisher: John Wiley and Sons
• Year: 1985
• Tongue: English
• Weight: 154 KB
• Volume: 91
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210910254