Simple Monte-Carlo computer procedure for the sputtering and depth parameter determination of implanted ions in amorphous targets

✍ Scribed by Juliusz Sielanko; Witold Szyszko

• Book ID: 118986388
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 536 KB
• Volume: 161
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(85)90730-7