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Comparison of Monte Carlo simulations and analytical models for the calculation of implantation profiles in multilayer targets

✍ Scribed by Heiner Ryssel; Wolfgang Krüger; Jürgen Lorenz

Book ID: 114168048
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 279 KB
Volume: 19-20
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(87)80011-3

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