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Molecular Dynamics Simulations of Atomic H Etching SiC Surface

โœ Scribed by W. Sun; H. Liu; L. Lin; C. Zhao; X. Lu; P. He; F. Gou


Book ID
116833377
Publisher
Elsevier
Year
2012
Tongue
English
Weight
692 KB
Volume
32
Category
Article
ISSN
1875-3892

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