✦ LIBER ✦

Molecular dynamics simulations of direct reactive ion etching: surface roughening of silicon by chlorine

✍ Scribed by Barone, M.E.; Robinson, T.O.; Graves, D.B.

Book ID: 117862715
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 275 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491699

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