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Molecular dynamics simulation of amorphous silicon sputtering by Ar+ ions

✍ Scribed by J.E. Rubio; L.A. Marqués; M. Jaraíz; L.A. Bailón; J. Barbolla


Book ID
113287673
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
316 KB
Volume
102
Category
Article
ISSN
0168-583X

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