✦ LIBER ✦
A molecular dynamics simulation of ultrathin oxide films on silicon: Growth by thermal O atoms and sputtering by 100 eV Ar+ ions
✍ Scribed by Kubota, A.; Economou, D.J.
- Book ID
- 111901919
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 450 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0093-3813
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