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Molecular dynamics simulations of reactive etching of SiC by energetic fluorine

✍ Scribed by F. Gou; L.Z.T. Chen; C. Meng; Q. Qian

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Etching of SiC by energetic F2: Molecula

✍ F. Gou; M.C. Liang; Z. Chen; Qiu Qian 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Molecular dynamics simulations of CF3 et

✍ F. Gou; L.T. Zen; Chuanliang Meng 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 356 KB

Molecular Dynamics Simulations of Atomic

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Molecular Dynamics Simulations of Energe

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✍ Barone, M.E.; Robinson, T.O.; Graves, D.B. 📂 Article 📅 1996 🏛 IEEE 🌐 English ⚖ 275 KB