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Molecular dynamics simulations of CF3 etching of SiC

✍ Scribed by F. Gou; L.T. Zen; Chuanliang Meng

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Molecular Dynamics Simulations of Atomic

✍ W. Sun; H. Liu; L. Lin; C. Zhao; X. Lu; P. He; F. Gou 📂 Article 📅 2012 🏛 Elsevier 🌐 English ⚖ 692 KB

Molecular dynamics simulations of reacti

✍ F. Gou; L.Z.T. Chen; C. Meng; Q. Qian 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 302 KB

Etching of SiC by energetic F2: Molecula

✍ F. Gou; M.C. Liang; Z. Chen; Qiu Qian 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Substrate temperature effect on F+ etchi

✍ X. Lu; J. Ning; Y. Qin; Q. Qiu; Zhang Chuanwu; Yan Ying; Jiang Ming; F. Gou 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 414 KB

CF3+ etching silicon surface: A molecula

✍ C. Zhao; X. Lu; P. He; P. Zhang; W. Sun; J. Zhang; F. Chen; F. Gou 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 586 KB

Molecular dynamics simulations of the sp

✍ A.-P. Prskalo; S. Schmauder; C. Ziebert; J. Ye; S. Ulrich 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 355 KB