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Substrate temperature effect on F+ etching of SiC: Molecular dynamics simulation

✍ Scribed by X. Lu; J. Ning; Y. Qin; Q. Qiu; Zhang Chuanwu; Yan Ying; Jiang Ming; F. Gou

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Etching of SiC by energetic F2: Molecula

✍ F. Gou; M.C. Liang; Z. Chen; Qiu Qian 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Molecular dynamics simulations of CF3 et

✍ F. Gou; L.T. Zen; Chuanliang Meng 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 356 KB

Molecular Dynamics Simulations of Atomic

✍ W. Sun; H. Liu; L. Lin; C. Zhao; X. Lu; P. He; F. Gou 📂 Article 📅 2012 🏛 Elsevier 🌐 English ⚖ 692 KB

Molecular dynamics simulations of reacti

✍ F. Gou; L.Z.T. Chen; C. Meng; Q. Qian 📂 Article 📅 2007 🏛 Springer 🌐 English ⚖ 302 KB

Molecular dynamics simulation of tempera

✍ Yaling Sun; Zunli Mo; Hong Chen; Ruibin Guo; Lijun Qiao; Hejun Li 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 500 KB

Molecular dynamics simulation of peeling

✍ Xinghua Shi; Yong Kong; Yapu Zhao; Huajian Gao 📂 Article 📅 2005 🏛 The Chinese Society of Theoretical and Applied Mec 🌐 English ⚖ 532 KB