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Modification of silicon waveguide structures using ion implantation induced defects

✍ Scribed by A.P. Knights; K.J. Dudeck; W.D. Walters; P.G. Coleman

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 313 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.05.167

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