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Modification of He implantation induced defects using fluorine co-implantation

✍ Scribed by D. Alquier; G. Gaudin; M.F. Beaufort; S.E. Donnelly; L. Haworth; F. Cayrel

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 435 KB
Volume: 257
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.01.028

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