Internal friction study of ion-implantation induced defects in silicon
โ Scribed by Xiao Liu; R.O. Pohl; D.M. Photiadis
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 294 KB
- Volume
- 442
- Category
- Article
- ISSN
- 0921-5093
No coin nor oath required. For personal study only.
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