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Modelling temperature effects in reactive sputtering of compound materials

✍ Scribed by M. Wautelet; J.P. Dauchot; S. Edart; M. Hecq

Book ID
107930555
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
272 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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