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Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering

✍ Scribed by T. Kubart; R.M. Schmidt; M. Austgen; T. Nyberg; A. Pflug; M. Siemers; M. Wuttig; S. Berg

Book ID
116893327
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
692 KB
Volume
206
Category
Article
ISSN
0257-8972

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