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Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering

✍ Scribed by Schmidt, Rüdiger M.; Ries, Patrick; Pflug, Andreas; Wuttig, Matthias; Kubart, Tomas


Book ID
122187014
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
455 KB
Volume
252
Category
Article
ISSN
0257-8972

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