✦ LIBER ✦
Modelling of the reactive sputtering process with non-uniform discharge current density and different temperature conditions
✍ Scribed by Vašina, P; Hytková, T; Eliáš, M
- Book ID
- 121296061
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 330 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0963-0252
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