✦ LIBER ✦

Modeling of reactive sputtering of compound materials

✍ Scribed by Berg, S.

Book ID: 121528584
Publisher: AVS (American Vacuum Society)
Year: 1987
Tongue: English
Weight: 659 KB
Volume: 5
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.574104

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