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Modeling the stability of reactive sputtering processes

✍ Scribed by H. Bartzsch; P. Frach

Book ID
108422873
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
188 KB
Volume
142-144
Category
Article
ISSN
0257-8972

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## Abstract Absorption of gases in liquid solutions accompanied by chemical reactions, or reactive absorption, represents one of the most important industrial operations. The advantages of this process are enhanced solution capacity, low impurity concentrations up to the ppm range, moderate operati