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A reactive sputtering process model for symmetrical planar diode systems

✍ Scribed by J.N. Avaritsiotis; C.D. Tsiogas

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 724 KB
Volume: 209
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90004-u

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