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Modelling of layer-by-layer sputtering of Si(111) surfaces under irradiation with low-energy ions

✍ Scribed by V.A. Zinovyev; L.N. Aleksandrov; A.V. Dvurechenskii; K.-H. Heinig; D. Stock

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
387 KB
Volume
241
Category
Article
ISSN
0040-6090

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