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A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films

✍ Scribed by T. Huhtamäki; M.O. Jahma; I.T. Koponen

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 414 KB
Volume: 264
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.08.073

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