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A simple model for the formation of compressive stress in thin films by ion bombardment

✍ Scribed by C.A. Davis

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 455 KB
Volume: 226
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90201-y

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