Surface and layer state of thin Au-Al layers after high-energy ion irradiation measured by RBS, scanning ion microprobe and SEM
✍ Scribed by Markwitz, A.; Demortier, G.
- Publisher
- John Wiley and Sons
- Year
- 1997
- Tongue
- English
- Weight
- 383 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
The surface and layer state of thin ion-beam-irradiated Au-Al layers was investigated with scanning high-energy ion microscopy (SHEIM), RBS and SEM. The thin metal layers (90 nm Au top layer and 200 nm A layer deposited on polished glassy carbon) were produced by evaporation and subsequently irradiated with 2.0 MeV 4He' ions (ion current 300 nA ; beam spot diameter 0.5 mm) to initiated the Au-Al interdi †usion process in the layered structure. In situ RBS measurements were performed during irradiation. Both SEM and SHEIM (threedimensional mapping) analysis of as-deposited and ion-beam-irradiated specimens showed the stability of the separated and interdi †used layers. Voids in the interdi †used Au-Al layer and at the specimen surface were not observed.
by John Wiley & Sons, Ltd.