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Modeling of Precursors for Atomic Layer Deposition of Magnesium and Calcium Oxide

✍ Scribed by Kazadojev, Ivan; Otway, David J.; Elliott, Simon D.

Book ID: 126853804
Publisher: John Wiley and Sons
Year: 2013
Tongue: English
Weight: 533 KB
Volume: 19
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.201207025

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