Atomic Layer Deposition of Indium Tin Oxide Thin Films Using Nonhalogenated Precursors

✍ Scribed by Elam, J.W.; Baker, D.A.; Martinson, A.B.F.; Pellin, M.J.; Hupp, J.T.

• Book ID: 120408314
• Publisher: American Chemical Society
• Year: 2008
• Tongue: English
• Weight: 345 KB
• Volume: 112
• Category: Article
• ISSN: 1932-7447
• DOI: 10.1021/jp7097312