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Atomic layer deposition of lanthana thin films using high-purity lanthanum amino precursors

✍ Scribed by Ronald Inman; Steven A. Schuetz; Carter M. Silvernail; Snjezana Balaz; Peter A. Dowben; Gregory Jursich; James McAndrew; John A. Belot


Book ID
113782152
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
350 KB
Volume
104
Category
Article
ISSN
0254-0584

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