✦ LIBER ✦

Modeling of deep grooving of silicon in the process of plasmochemical cyclic etching/passivation

✍ Scribed by A. S. Shumilov; I. I. Amirov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation of the effects of deep groovi

✍ A. S. Shumilov; I. I. Amirov; V. F. Lukichev 📂 Article 📅 2009 🏛 Springer 🌐 English ⚖ 454 KB

Formation of microstructures on silicon

✍ I. I. Amirov; N. V. Alov 📂 Article 📅 2008 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 285 KB

Modelling of deep silicon etching in mul

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Application of experimental and numerica

✍ Galperin, V. A. 📂 Article 📅 2012 🏛 Springer 🌐 English ⚖ 335 KB