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Simulation of the effects of deep grooving in silicon in the plasmochemical cyclic process

✍ Scribed by A. S. Shumilov; I. I. Amirov; V. F. Lukichev


Book ID
110214418
Publisher
Springer
Year
2009
Tongue
English
Weight
454 KB
Volume
38
Category
Article
ISSN
1063-7397

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