Model study of electron beam charge compensation for positive secondary ion mass spectrometry using a positive primary ion beam

✍ Scribed by Zhengmao Zhu; Frederick A. Stevie; Dieter P. Griffis

• Book ID: 108060401
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 378 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.10.008