✦ LIBER ✦
7676. An situ study of the reactive ion beam etching of tungsten with tetrafluoremethane/argon mixtures using ion scattering spectroscopy and secondary ion mass spectrometry: T I Cox et al,J Vac Sci Technol, A8, 1990, 1685–1689
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 143 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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