A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values
โฆ LIBER โฆ
A C60 Primary Ion Beam System for Time of Flight Secondary Ion Mass Spectrometry: Its Development and Secondary Ion Yield Characteristics
โ Scribed by Weibel, Daniel; Wong, Steve; Lockyer, Nicholas; Blenkinsopp, Paul; Hill, Rowland; Vickerman, John C.
- Book ID
- 111872653
- Publisher
- American Chemical Society
- Year
- 2003
- Tongue
- English
- Weight
- 145 KB
- Volume
- 75
- Category
- Article
- ISSN
- 0003-2700
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