✦ LIBER ✦

A New Focused Ion Beam Optical System for a Time-of-flight-Secondary Ion Mass Spectrometry Instrument

✍ Scribed by H. Shichi; S. Osabe; K. Kanehori

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 157 KB
Volume: 11
Category: Article
ISSN: 0951-4198
DOI: 10.1002/(sici)1097-0231(19970131)11:2<175::aid-rcm725>3.0.co;2-k

No coin nor oath required. For personal study only.

✦ Synopsis

A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values to be adopted. A calculated minimum beam diameter of 10 nm and a mean current of 4 pA, which are sufficient for highly sensitive microarea element analysis, were obtained under the conditions where the acceleration voltage was 40 kV, the working distance between the einzel objective lens and a sample was 6 mm, and the thickness of the objective lens was 8 mm.

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