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Model of silicon epitaxial growth in SiCl4-HCl-H2 system based on flow graph

✍ Scribed by Jacek Korec

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 685 KB
Volume: 46
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(79)90084-8

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