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Heteroepitaxial growth of β-SiC on silicon substrate using SiCl4-C3H8-H2 system

✍ Scribed by Hiroyuki Matsunami; Shigehiro Nishino; Tetsuro Tanaka


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
444 KB
Volume
45
Category
Article
ISSN
0022-0248

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