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Microwave multipolar plasma for etching and deposition

✍ Scribed by Rudolf R. Burke; Claude Pomot

Book ID: 107925807
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 579 KB
Volume: 36
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90922-7

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