✦ LIBER ✦

Advanced Power Supplies designed for Plasma Deposition and Etching

✍ Scribed by Dirk Ochs; Thomas Rettich

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Microwave multipolar plasma for etching

✍ Rudolf R. Burke; Claude Pomot 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 579 KB

Low-pressure plasma sources for etching

✍ Cooke, M J; Hassall, G 📂 Article 📅 2002 🏛 Institute of Physics 🌐 English ⚖ 110 KB

A high voltage pulse power supply for me

✍ Salvadori, M. C.; Teixeira, F. S.; ArauÌjo, W. W. R.; Sgubin, L. G.; Sochugov, 📂 Article 📅 2010 🏛 American Institute of Physics 🌐 English ⚖ 691 KB

Issues and advances in high-frequency ma

✍ Lotfi, A.W.; Wilkowski, M.A. 📂 Article 📅 2001 🏛 IEEE 🌐 English ⚖ 344 KB

Design and Implementation of Multiple-Ou

✍ Ching-Lung Chu; Chuan-Jyun Liang; Jun-Rong Chen; Ming-Chao Pan; Hsin- Jung Wang 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 411 KB

Impact of ITER PF coils power supplies a

✍ M. Cavinato; C.V. Labate; M. Mattei; V. Parail; G. Saibene; R. Sartori; A.C.C. S 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 322 KB