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Low-pressure plasma sources for etching and deposition

✍ Scribed by Cooke, M J; Hassall, G

Book ID: 120535345
Publisher: Institute of Physics
Year: 2002
Tongue: English
Weight: 110 KB
Volume: 11
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/11/3A/311

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