✦ LIBER ✦

Particle-plasma interactions during low pressure plasma deposition

✍ Scribed by D. Apelian; D. Wei; M. Paliwal

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 612 KB
Volume: 118
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90269-4

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