✦ LIBER ✦

Deposition of polymer films in low pressure reactive plasmas

✍ Scribed by H. Biederman

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 605 KB
Volume: 86
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90282-0

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