A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

✍ Scribed by Salvadori, M. C.; Teixeira, F. S.; Araújo, W. W. R.; Sgubin, L. G.; Sochugov, N. S.; Spirin, R. E.; Brown, I. G.

• Book ID: 120971962
• Publisher: American Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 691 KB
• Volume: 81
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.3518969