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A 100 kV 10 A high-voltage pulse generator for plasma immersion ion implantation

✍ Scribed by Brutscher, Jörg

Book ID: 121735738
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 323 KB
Volume: 67
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.1147225

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