A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

✍ Scribed by Rossi, J.O.; Ueda, M.; Barroso, J.J.; Spassov, V.A.

• Book ID: 114559032
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 87 KB
• Volume: 28
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.901204