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Novel plasma immersion ion implantation and deposition hardware and technique based on high power pulsed magnetron discharge

✍ Scribed by Wu, Zhongzhen; Tian, Xiubo; Shi, Jingwei; Wang, Zeming; Gong, Chunzhi; Yang, Shiqin; Chu, Paul K.

Book ID: 121752979
Publisher: American Institute of Physics
Year: 2011
Tongue: English
Weight: 705 KB
Volume: 82
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.3565175

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