[IEEE 2012 7th International Forum on Strategic Technology (IFOST) - Tomsk, Russia (2012.09.18-2012.09.21)] 2012 7th International Forum on Strategic Technology (IFOST) - Application of high-frequency short-pulsed plasma-immersion ion implantation or deposition method for dielectric materials processing using gas, metal and gas-metal plasma

✍ Scribed by Ryabchikov, A. I.; Stepanov, I. B.; Sivin, D. O.; Bumagina, A. I.

• Book ID: 121339227
• Publisher: IEEE
• Year: 2012
• Weight: 262 KB
• Category: Article
• ISBN: 1467317713
• DOI: 10.1109/IFOST.2012.6357802