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[IEEE 2012 7th International Forum on Strategic Technology (IFOST) - Tomsk, Russia (2012.09.18-2012.09.21)] 2012 7th International Forum on Strategic Technology (IFOST) - High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part two)

โœ Scribed by Ryabchikov, A. I.; Stepanov, I. B.; Sivin, D. O.; Dektyarev, S. V.; Dodorin, K. Yu.

Book ID
121338534
Publisher
IEEE
Year
2012
Weight
246 KB
Category
Article
ISBN
1467317713

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[IEEE 2012 7th International Forum on St
[IEEE 2012 7th International Forum on Strategic Technology (IFOST) - Tomsk, Russia (2012.09.18-2012.09.21)] 2012 7th International Forum on Strategic Technology (IFOST) - Application of high-frequency short-pulsed plasma-immersion ion implantation or deposition method for dielectric materials processing using gas, metal and gas-metal plasma
โœ Ryabchikov, A. I.; Stepanov, I. B.; Sivin, D. O.; Bumagina, A. I. ๐Ÿ“‚ Article ๐Ÿ“… 2012 ๐Ÿ› IEEE โš– 262 KB