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[IEEE IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference - Las Vegas, NV, USA (17-22 June 2001)] IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) - High-voltage microsecond pulse generator for plasma immersion ion implantation

✍ Scribed by Vizir, V.A.; Zorin, V.B.; Ivanov, S.V.; Kovalchuk, B.M.; Maksimenko, A.D.; Manilov, V.I.; Smorudov, G.V.; Shubkin, N.G.; Chervyakov, V.V.

Book ID: 120972198
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 84 KB
Category: Article
ISBN-13: 9780780371415
DOI: 10.1109/PPPS.2001.960755

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