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Microtrench of oxynitride thin films in a C2F6 inductively coupled plasma

✍ Scribed by Byungwhan Kim; Byung Teak Lee

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 380 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.024

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