๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Microstructure and its effect on the conductivity of magnetron sputtered carbon thin films

โœ Scribed by Dimitriadis, C. A.; Hastas, N. A.; Vouroutzis, N.; Logothetidis, S.; Panayiotatos, Y.

Book ID
118251620
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
661 KB
Volume
89
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Post-annealing effect in reactive r.f.-m
Post-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films
โœ Chen, G. L.; Li, Y.; Lin, J.; Huan, C. H. A.; Guo, Y. P. ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 106 KB

Thin films of CN x were deposited by reactive r.f.-magnetron sputtering on Si(100) substrates. The effect of annealing temperatures on the structural properties of the films has been studied by Fourier transform infrared (FTIR) spectroscopy, x-ray photoelectron spectroscopy (XPS) and transmission el