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Effect of N2 partial pressure on the microstructure and mechanical properties of magnetron sputtered CrNx films

✍ Scribed by Zenghu Han; Jiawan Tian; Qianxi Lai; Xiaojiang Yu; Geyang Li

Book ID
108423137
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
360 KB
Volume
162
Category
Article
ISSN
0257-8972

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